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Hybrid lithography system for MEMS/NEMS.

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    Title: Hybrid lithography system for MEMS/NEMS.
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    Date: 2013
    Publication type: Conference paper
    Authors:
    No. First name Last name Show
    1. Linsen Chen
    2. Donglin Pu
    3. Jin Hu
    4. Yan Ye
    5. Pengfei Zhu
    Download (by DOI): 10.1109/NEMS.2013.6559737
    BibTeX: conf/nems/ChenPHYZ13
    DBLP: db/conf/nems/nems2013.html#ChenPHYZ13
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    Conference
    Name: 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013 2013
    URL: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6556708
    DBLP: db/conf/nems/nems2013.html